In addition to what you have already thought of, I would suggest:
For Faculty: For junior faculty I would also ask if they felt that they have been supported by the department/college. If they have graduate students I would ask about their experiences working with graduate students - how many graduate students do each faculty member have on average? What is the quality of the graduate students? Do they get to admit students or are students admitted to the program and then assigned to them? Also, asking a question like "What are you personally looking for in someone to fill this position?" You can also ask about teaching - what is the typical teaching load? Do you often teach multiple sections of the same class or not? Are there any specific courses that the faculty hope someone in this position can teach?
Department Chair: Questions about tenure are definitely appropriate. What are the expectations in the department for tenure? (They will tell you basically it is excellence in research and teaching and commitment to service.) Is research (or teaching depending on the type of university) weighed more heavily? How successful have past individuals been in getting tenure? Also, you don't need to have a start up spreadsheet prepared but asking general questions about start up would be good. Ask specifically about things you might need (money to pay participants, space requirements, specific equipment, etc).
Deans: Ask about seed money for research - are there any opportunities for seed money outside of start up? What sort of grant writing support is there? Does the college/university have a grant editor? What is the university's policy on sabbatical leave? I would probably not ask the quality of life type questions in the deans meeting. Save this for your faculty meetings.
Graduate students: What do they hope the new hire will bring? What graduate classes are currently not offered that they would like to see offered. Do most students work in one lab or are students working in a variety of labs? What are there research interests?